ASML is basically a strategic asset. Breaking them up to have a more level playing field inherently threatens the West’s economic-political position. If ASML abused their position, it wouldn’t be the regulators so much as the CIA that showed up to tell them to reconsider.
I put together this gif for a side-by-side comparison. The picture was taken from a slightly different location, so it’s not perfect, but the difference is obvious.